Auto loading system
Process chamber : DC Power [Option DC+RF]
Process chamber : DC Power [Option DC+RF]
3-Co Deposition #2 12" Wafer rotation type
[Gun1 RF+DC Power ,Gun2 DC Power, Gun3 DC Power]
Process : Metal , Oxide , TCO
Mosfet ,Power Semiconductor Device...
Description of the Product
Auto loading system
Process chamber : DC Power [Option DC+RF]
Process chamber : DC Power [Option DC+RF]
3-Co Deposition #2 12" Wafer rotation type
[Gun1 RF+DC Power ,Gun2 DC Power, Gun3 DC Power]
Process : Metal , Oxide , TCO
Mosfet ,Power Semiconductor Device
1. Wafer loading system
2. Load-lock chamber
3. Process chamber#1
4. Process chamber#2
5. Unload-lock chamber
6. Wafer unloading system
Price of the Product
I want to get more details about the product
Company catalogues - Baco-solution
